Magneto-resistive effect element

ABSTRACT

A magneto-resistive effect element includes a magnetization free layer, an intermediate layer, and a magnetization pinned layer. The magnetization free layer extends along a first plane. The intermediate layer extends along the first plane, and is stacked on the magnetization free layer. The magnetization pinned layer extends along the first plane, and is provided on side opposite to the magnetization free layer with the intermediate layer being interposed therebetween. Here, the magnetization free layer includes an end surface that has a maximum inclination angle of 42° or less relative to the first plane.

CROSS REFERENCE TO RELATED APPLICATIONS

This is a Continuation of application Ser. No. 15/908,066 filed Feb. 28,2018, which claims the benefit of Japanese Priority Patent ApplicationJP 2017-077569 filed on Apr. 10, 2017. The disclosures of the priorapplications are hereby incorporated by reference herein in theirentireties.

BACKGROUND

The disclosure relates to a magneto-resistive effect element thatincludes a magnetization free layer.

As a magnetic field detection device that detects an external magneticfield, a magnetic field detection device utilizing a Hall element or amagneto-resistive effect element has been known. For example, referenceis made to International Publication No. WO 2008/146809.

SUMMARY

It has been requested to improve accuracy in detection of a magneticfield in a magnetic field detection device.

It is desirable to provide a magneto-resistive effect element thatincludes a magnetization free layer with a lower saturating magneticfield.

A magneto-resistive effect element according to an embodiment of thedisclosure includes: a magnetization free layer that extends along afirst plane; an intermediate layer that extends along the first plane,and is stacked on the magnetization free layer; and a magnetizationpinned layer that extends along the first plane, and is provided on sideopposite to the magnetization free layer with the intermediate layerbeing interposed therebetween. Here, the magnetization free layerincludes an end surface that has a maximum inclination angle of 42° orless relative to the first plane.

BRIEF DESCRIPTION OF THE DRAWINGS

The accompanying drawings are included to provide a furtherunderstanding of the disclosure, and are incorporated in and constitutea part of this specification. The drawings illustrate embodiments and,together with the specification, serve to explain the principles of thedisclosure.

FIG. 1 is a perspective view of an overall configuration of amagneto-resistive effect device that includes a magneto-resistive effectelement according to an embodiment of the disclosure.

FIG. 2 is a schematic diagram illustrating a cross-sectional shape of apart of the magneto-resistive effect element illustrated in FIG. 1.

FIG. 3A is a schematic cross-sectional view of a magnetization freelayer illustrated in FIG. 1 with a state of magnetization.

FIG. 3B is a schematic cross-sectional view of a magnetization freelayer as a reference example with a state of magnetization.

FIG. 4A is a first schematic plan view of the magnetization free layerillustrated in FIG. 3B with a state of magnetization.

FIG. 4B is a second schematic plan view of the magnetization free layerillustrated in FIG. 3B with a state of magnetization.

FIG. 4C is a third schematic plan view of the magnetization free layerillustrated in FIG. 3B with a state of magnetization.

FIG. 5 is a perspective view of an overall configuration of amagneto-resistive effect device that includes a magneto-resistive effectelement according to a modification example.

FIG. 6A is a characteristic diagram illustrating a relationship betweena maximum inclination angle of an end surface and an angular error inExperimental Example 1.

FIG. 6B is a characteristic diagram illustrating a relationship betweena minimum inclination angle of an end surface and an angular error inExperimental Example 2.

FIG. 7A is a characteristic diagram illustrating a relationship betweena film thickness of a magnetization free layer and a saturating magneticfield of the magnetization free layer in Experimental Example 3.

FIG. 7B is a characteristic diagram illustrating a relationship betweena film thickness of a magnetization free layer and a resistance changerate of the magnetization free layer in Experimental Example 4.

FIG. 7C is a characteristic diagram illustrating a relationship betweena length of a magnetization free layer and a saturating magnetic fieldof the magnetization free layer in Experimental Example 5.

FIG. 8 is a characteristic diagram illustrating a relationship between alength of each of a flat part and an inclined part of a magnetizationfree layer and a saturating magnetic field of the magnetization freelayer in Experimental Example 6.

DETAILED DESCRIPTION

Some embodiments of the disclosure are described below in detail withreference to the accompanying drawings.

It is to be noted that the following description is directed toillustrative examples of the technology and not to be construed aslimiting to the technology. Factors including, without limitation,numerical values, shapes, materials, components, positions of thecomponents, and how the components are coupled to each other areillustrative only and not to be construed as limiting to the technology.Further, elements in the following example embodiments which are notrecited in a most-generic independent claim of the technology areoptional and may be provided on an as-needed basis. The drawings areschematic and are not intended to be drawn to scale. It is to be notedthat the like elements are denoted with the same reference numerals, andany redundant description thereof will not be described in detail. It isto be noted that the description is given in the following order.

-   1. One Example Embodiment-   2. Experimental Examples-   3. Other Modification Examples

[1. One Example Embodiment] [Configuration of Magneto-Resistive EffectDevice]

FIG. 1 is a perspective view of a magneto-resistive effect deviceaccording to an embodiment of the disclosure. The magneto-resistiveeffect device may include, for example, a magneto-resistive effectelement 1, an upper electrode 5, and a lower electrode 6.

The magneto-resistive effect device may detect, for example, presence orabsence of an external magnetic field and intensity of the externalmagnetic field. The external magnetic field may be a detection targetmagnetic field that influences the magneto-resistive effect deviceitself. The magneto-resistive effect device may be mounted on, forexample, an electronic compass, an angle detection sensor, or any otherdevice that detects presence or absence and intensity of the externalmagnetic field. A direction in which the external magnetic field isapplied may be an X-axis direction, for example.

The upper electrode 5 and the lower electrode 6 may be a pair ofelectrodes that each extend both in the X-axis direction and a Y-axisdirection. The upper electrode 5 and the lower electrode 6 may beprovided to interpose the magneto-resistive effect element 1 in adirection in which layers are stacked (e.g., in a Z-axis direction). Thelayers may configure the magneto-resistive effect element 1. That is,the upper electrode 5 and the lower electrode 6 may serve to supply asignal current to the magneto-resistive effect element 1 in a directionintersecting a surface of each of the layers that configure themagneto-resistive effect element 1. The intersecting direction may be,for example, a direction that is perpendicular to the surface of each ofthe layers (i.e., a thickness direction) that configure themagneto-resistive effect element 1. In one embodiment, the upperelectrode 5 and the lower electrode 6 may be each configured by, forexample, a single-layer film or a stacked-layer film. The single-layerfilm may contain, as a main material, aluminum (Al), tantalum (Ta),copper (Cu), gold (Au), a gold-copper alloy (AuCu), or ruthenium (Ru).The stacked-layer film may be configured by two or more stackedsingle-layer films each containing the above material as the mainmaterial. It is to be noted that an X-Y plane is a specific butnon-limiting example corresponding to a “first plane” of the disclosure.

The magneto-resistive effect element 1 may include a stacked body inwhich, for example, a magnetization pinned layer 2, an intermediatelayer 3, and a magnetization free layer 4 are stacked in order on thelower electrode 6.

The magnetization pinned layer 2 may contain, for example, aferromagnetic material as a main material, and its magnetizationdirection is pinned in substantially one direction. In one embodiment,non-limiting examples of the ferromagnetic material contained in themagnetization pinned layer 2 may include a high-spin-polarizabilitymaterial such as a simple substance including iron (Fe), cobalt (Co),and nickel (Ni), as well as a nickel-iron alloy, an iron-cobalt alloy,and an iron-cobalt-boron (B) alloy. Selection of such ahigh-spin-polarizability material allows for obtainment of a highmagneto-resistance change rate in the magneto-resistive effect element1.

Further, non-limiting examples of the ferromagnetic material thatconfigures the magnetization pinned layer 2 may include cobalt (CO), acobalt-chromium-based (Co—Cr-based) alloy, a cobalt (CO) multi-layer, acobalt-chromium-platinum-based (Co—Cr—Pt-based) alloy, aniron-platinum-based (Fe—Pt-based) alloy, a samarium-cobalt-based(Sm—Co-based) alloy including a rare earth element, and aterbium-iron-cobalt-based (Tb—Fe—Co-based) alloy including a rare earthelement. The magnetization pinned layer 2 that contains theferromagnetic material as a main constituent material has magnetizationpinned along a normal direction of a film surface. Non-limiting examplesof the ferromagnetic material that configures the magnetization pinnedlayer 2 having magnetization pinned along the normal direction of thefilm surface may include, besides those mentioned above, acobalt/platinum (Co/Pt) artificial lattice film, a cobalt/palladium(Co/Pd) artificial lattice film, an iron/palladium (Fe/Pd) artificiallattice film, and iron boride (FeB). The magnetization pinned layer 2may also contain a Heusler alloy as a main material. The magnetizationpinned layer 2 may have a film thickness of about 1 nm to about 10 nm,for example. In order to stabilize the magnetization of themagnetization pinned layer 2, an antiferromagnetic layer may be furtherprovided to be in contact with a surface, of the magnetization pinnedlayer 2, opposite to the intermediate layer 3. In an alternativeembodiment, magnetization anisotropy caused by a crystal structure or ashape may be utilized to stabilize the magnetization of themagnetization pinned layer 2. Non-limiting examples of a constituentmaterial of such an antiferromagnetic layer may include ferrous oxide(FeO), cobaltous oxide (CoO), nitric oxide (NiO), chalcopyrite (CuFeS₂),iridium manganese (IrMn), ferrous manganese (FeMn), platinum manganese(PtMn), chromium (Cr), and manganese (Mn).

The magnetization pinned layer 2 may have a synthetic structureincluding a pair of ferromagnetic films and a non-magnetic electricallyconductive film interposed therebetween, in which the pair offerromagnetic films are antiferromagnetically coupled together. In thiscase, the magnetization pinned layer 2 may have a self-pinned structurein which the magnetization of the magnetization pinned layer 2 isstabilized, without using the antiferromagnetic layer, by adjusting therespective thicknesses of the pair of ferromagnetic films and thethickness of the non-magnetic electrically conductive film interposedtherebetween.

The intermediate layer 3 may be interposed between the magnetizationpinned layer 2 and the magnetization free layer 4. The magneto-resistiveeffect element 1 obtains a magneto-resistive effect through aninteraction between the magnetization of the magnetization pinned layer2 and magnetization of the magnetization free layer 4 via theintermediate layer 3. The intermediate layer 3 may be configured by alayer that includes an electric conductor, an insulator, or asemiconductor. In an alternative embodiment, the intermediate layer 3may include a layer (i.e., a current confinement layer) that includes,in an insulator, an electrically conductive point configured by aconductor.

Non-limiting examples of a non-magnetic electrically conductive materialto be applied to the intermediate layer 3 may include copper (Cu),silver (Ag), gold (Au), and ruthenium (Ru). In a case where theintermediate layer 3 is configured by such a non-magnetic electricallyconductive material, the magneto-resistive effect element 1 exhibits agiant magneto-resistive (GMR) effect. In this case, the film thicknessof the intermediate layer 3 may be set to about 0.5 nm to about 3.5 nm,for example.

Non-limiting examples of a non-magnetic insulating material to beapplied to the intermediate layer 3 may include alumina (A1 ₂O₃) andmagnesium oxide (MgO). In a case where the intermediate layer 3 isconfigured by such a non-magnetic insulating material, themagneto-resistive effect element 1 exhibits a tunnelingmagneto-resistive (TMR) effect. In this case, the film thickness of theintermediate layer 3 may be so adjusted as to exhibit a coherenttunneling effect between the magnetization pinned layer 2 and themagnetization free layer 4. The film thickness of the intermediate layer3 may be set to about 0.5 nm to about 3.5 nm, for example.

Non-limiting examples of a non-magnetic semiconductor material to beapplied to the intermediate layer 3 may include zinc oxide (ZnO),indium(III) oxide (In₂O₃), stannic oxide (SnO₂), indium tin oxide (ITO),gallium oxide (GaO_(x)), and gallium oxide (Ga₂O_(x)). In this case, thefilm thickness of the intermediate layer 3 may be set to about 1.0 nm toabout 4.0 nm, for example, in one embodiment.

In one embodiment, the current confinement layer to be applied to theintermediate layer 3 may have a structure provided with the electricallyconductive point that is configured by a conductor in the non-magneticinsulator made of Al₂O₃ or MgO, for example. Non-limiting examples ofthe conductor may include cobalt iron (CoFe), cobalt iron boride(CoFeB), cobalt iron silicon (CoFeSi), cobalt manganese germanium(CoMnGe), cobalt manganese silicon (CoMnSi), cobalt manganese aluminum(CoMnAl), iron (Fe), cobalt (Co), gold (Au), copper (Cu), aluminum (Al),and magnesium (Mg). In this case, the film thickness of the intermediatelayer 3 may be set to about 0.5 nm to about 2.0 nm, for example, in oneembodiment.

The magnetization free layer 4 has a magnetization direction that variesdepending on an externally applied magnetic field or a spin-polarizedelectron. The magnetization free layer 4 may be configured by aferromagnetic material. Non-limiting examples of the ferromagneticmaterial that configures the magnetization free layer 4 may includenickel iron (NiFe), cobalt iron (CoFe), cobalt iron boride (CoFeB),cobalt iron silicon (CoFeSi), cobalt manganese germanium (CoMnGe),cobalt manganese silicon (CoMnSi), and cobalt manganese aluminum(CoMnAl). In a case where such a ferromagnetic material is contained asa main constituent material, the magnetization free layer 4 has amagnetization easy axis along an intra-film surface direction. Themagnetization free layer 4 may have a thickness of about 1 nm to about20 nm, for example. The magnetization free layer 4 may have a thicknessin a range from 6 nm to 13 nm, in one embodiment.

As illustrated in FIG. 2, the magnetization free layer 4 includes an endsurface 41 that has a maximum inclination angle θ 2 of 42° or lessrelative to the X-Y plane. Further, the end surface 41 has a minimuminclination angle θ 1 of 25° or less relative to the X-Y plane. In aspecific but non-limiting example, the end surface 41 has the minimuminclination angle θ 1 of 25° or less (≤)25° relative to the X-Y plane ata position P1. The position P1 may be a position at which the endsurface 41 and a bottom surface 42 intersect each other. The end surface41 has the maximum inclination angle θ 2 of 42° or less (≤42°) relativeto the X-Y plane at a position P2. The position P2 may be a position atwhich the end surface 41 and a top surface 43 intersect each other.Further, the magnetization free layer 4 further includes a flat part R1that has a substantially constant thickness T1, and an inclined part R2that includes the end surface 41 and has a thickness T2. The thicknessT2 decreases as being away from the flat part R1. FIG. 2 is a schematicdiagram illustrating a cross-sectional shape of a part of themagneto-resistive effect element illustrated in FIG. 1. In a case wherethe flat part R1 has a length L1 of 6 μm or less, for example, in adirection of a detection target magnetic field along the X-Y plane,i.e., in the X-axis direction, effects of inclining the end surface 41of the magnetization free layer 4 become remarkable as described later.

The magnetization free layer 4 satisfies the following conditionalexpression (1).

L2*(L1)²≥0.4   (1)

where L1 denotes a length of the flat part R1 of the magnetization freelayer 4 along the X-Y plane, and L2 denotes a length of the inclinedpart R2 of the magnetization free layer 4 along the X-Y plane.

The magnetization free layer 4 may further include the bottom surface 42that extends along the X-Y plane and faces the intermediate layer 3, andthe top surface 43 that extends along the X-Y plane and is positionedopposite to the intermediate layer 3. A part, of the end surface 41,between the position P1 and the position P2 may be recessed from aposition on a linear line L12 that connects the position P1 and theposition P2 on a Y—Z plane that is orthogonal to the X-Y plane, asillustrated in FIG. 2. The position P1 may be a position at which theend surface 41 and the bottom surface 42 intersect each other, and theposition P2 may be a position at which the end surface 41 and the topsurface 43 intersect each other. In other words, the end surface 41 mayhave a concave shape relative to the outside. The end surface 41 havingsuch a concave shape causes an inclination angle near the position P1,of the end surface 41, close to the intermediate layer 3 to be smallerthan an inclination angle of another part (e.g., near the position P2)of the end surface 41. Thus, it becomes possible to more effectivelyreduce hysteresis of an output caused by shape anisotropy of themagnetization free layer 4 near the intermediate layer 3.

A cap layer, a seed layer, or a buffer layer may be interposed betweenthe upper electrode 5 and the magneto-resistive effect element 1 as wellas between the lower electrode 6 and the magneto-resistive effectelement 1. Non-limiting examples of each of the cap layer, the seedlayer, and the buffer layer may include a single-layer film made ofruthenium (Ru), tantalum (Ta), copper (Cu), or chromium (Cr), forexample, and a stacked-layer film configured by a plurality of stackedsingle-layer films. In one embodiment, each of the cap layer, the seedlayer, and the buffer layer may have a film thickness of about 1 nm toabout 20 nm.

Although FIG. 1 exemplifies a case where the magneto-resistive effectelement 1 has a frustum shape and the magnetization free layer 4 has acircular shape (i.e., a planar shape) along the X-Y plane, the planarshape of the magnetization free layer 4 is not particularly limitedthereto. The planar shape of the magnetization free layer 4 may also bean elliptical shape or a quadrangular shape, for example.

[Workings and Effects of Magneto-Resistive Effect Device]

Description is give next of workings and effects of themagneto-resistive effect device, with reference to FIGS. 3A and 3B aswell as to FIGS. 4A to 4C. FIG. 3A is an enlarged cross-sectional viewof a vicinity of the end surface 41 of the magnetization free layer 4 inthe magneto-resistive effect element 1, and schematically illustratesdistribution of magnitude of magnetization and a direction of themagnetization along an X-Z cross-section. FIG. 3B is an enlargedcross-sectional view of a vicinity of an end surface 141 of amagnetization free layer 104, as a reference example, having a constantthickness. FIGS. 4A to 4C each schematically illustrate distribution ofmagnitude of magnetization and a direction of the magnetization in theX-Y plane of the magnetization free layer 104 as a reference example. InFIGS. 3A and 3B as well as in FIGS. 4A to 4C, a length of an arrowindicates magnitude of magnetization, and a direction of the arrowindicates a direction of the magnetization.

The magneto-resistive effect device may be used with a bias magneticfield Hb being applied in +X direction, for example. FIGS. 3B and 4Aeach illustrate the magnetization free layer 104 in the X-Y plane with astate of magnetization, for example, in a case where only the biasmagnetic field Hb in the +X direction is applied and a detection targetmagnetic field Hs is zero (0). In this case, the magnetization freelayer 104 has, as a main magnetization component, magnetization M1 insubstantially the same direction (+X direction) as that of the biasmagnetic field Hb. The main magnetization component may also beconsidered as a total sum of all spins in the magnetization free layer104. However, in both ends R102 and R103 in the X-axis direction, forexample, there are magnetizations M2 (M2A to M2D) and magnetizations M3(M3A to M3D) along the end surface 141, due to shape anisotropy of themagnetization free layer 104. In FIG. 4A, the magnetizations M2A to M2Dhave substantially the same magnitudes as those of the magnetizationsM3A to M3D, respectively. The magnetizations M2A, M2B, M3C, and M3D areoriented substantially in +Y direction, and the magnetizations M2C, M2D,M3A, and M3B are oriented substantially in −Y direction.

When the detection target magnetic field Hs is applied in the +Ydirection, for example, the magnetization M1 oriented in the +Xdirection becomes slightly inclined in the +Y direction, as illustratedin FIG. 4B. Further, the magnetization M2C and the magnetization M3Beach oriented substantially in −Y direction become reversed to beoriented substantially in the +Y direction. When the application of thedetection target magnetic field Hs is stopped afterward, themagnetization M1 slightly inclined to the +Y direction from the +Xdirection returns to the +X direction along the bias magnetic field Hb,as illustrated in FIG. 4C. However, there may be a case where themagnetization M2C and the magnetization M3B are kept orientedsubstantially in the +Y direction. In this case, the magnetization M2Cand the magnetization M3B influence a direction of an overallmagnetization of the magnetization free layer 104 as magnetizationcomponents that do not follow the detection target magnetic field Hs,thus resulting in an error in an output signal.

Accordingly, in the present example embodiment, an end of themagnetization free layer 4 is set as the inclination part R2, and isdesigned to be gradually thinner in its thickness as being closer to atip part R21, as illustrated in FIG. 3A. However, the magnetization freelayer 104 as a reference example illustrated in FIG. 3B has asubstantially constant thickness up to the end surface 141. This causesmore magnetization M2 (or M3) oriented in a direction different fromthat of the bias magnetic field Hb to be present in the end R102 (orR103) near the end surface 141. In contrast, the magnetization freelayer 4 of the present example embodiment includes the inclined part R2at its end, thus allowing for reduction in an area to be influenced bythe shape anisotropy. This makes it possible to reduce rate of themagnetization M2 (or M3) present in the entire magnetization free layer4, as compared with rate of the magnetization M2 (or M3) present in themagnetization free layer 104. As a result, it becomes possible for themagneto-resistive effect element 1 including the magnetization freelayer 4 to reduce the magnetization component that does not follow thedetection target magnetic field Hs, as compared with the case ofincluding the magnetization free layer 104, thus allowing for reductionin the error in an output signal.

In the present example embodiment, the magnetization free layer 4 thusincludes the end surface 41 that is inclined relative to the X-Y planein which the magnetization free layer 4 extends. This alleviates theinfluence of the shape anisotropy of the magnetization free layer 4,making it possible to reduce magnetostatic energy of the end surface 41and thus to reduce an amount of magnetization, positioned near the endsurface 41, which is less likely to follow the detection target magneticfield Hs. As a result, it becomes possible to achieve a lower saturatingmagnetic field in the magnetization free layer 4, and thus to reduce theerror in an output signal supplied from the magneto-resistive effectelement 1. In particular, in a case where the flat part R1 has a lengthL1 of 6 μm or less as illustrated in FIG. 1 in a direction of thedetection target magnetic field along the X-Y plane, i.e., in the X-axisdirection, the above-described effects of inclining the end surface 41of the magnetization free layer 4 become remarkable.

Further, in the present example embodiment, the magnetization free layer4 satisfies the conditional expression (1), where L1 denotes a length ofthe flat part R1 of the magnetization free layer 4 along the X-Y plane,and L2 denotes a length of the inclined part R2 of the magnetizationfree layer 4 along the X-Y plane. In such a case, it becomes possible tofurther reduce the amount of magnetization, positioned near the endsurface 41, which is less likely to follow the detection target magneticfield Hs. As a result, it becomes possible to reduce the error in anoutput signal supplied from the magneto-resistive effect element 1.

[2. Experimental Examples] Experimental Example 1

Examination was conducted next, in terms of the magneto-resistive effectelement 1 according to the foregoing example embodiment, on arelationship between the maximum inclination angle θ 2 of the endsurface 41 and an angular error of an angle of a signal magnetic fieldhaving predetermined intensity. The angular error of the angle of thesignal magnetic field having predetermined intensity is to be detectedupon application of the signal magnetic field to the magneto-resistiveeffect element 1. The results thereof are illustrated in FIG. 6A. InFIG. 6A, the horizontal axis indicates the maximum inclination angle θ 2[in unit of degree, i.e.,° ] of the end surface 41 of the magnetizationfree layer 4, and the vertical axis indicates an angular error [in unitof degree, i.e.,° ] of the signal magnetic field to be detected by themagneto-resistive effect element 1. In this experimental example, theexamination was conducted on intensity of each of signal magnetic fieldsin four levels of 20 mT, 21 mT, 22 mT, and 23 mT. The maximuminclination angle θ 2 of the end surface 41 was set to four levels of30°, 42°, 47°, and 54°. The magnetization pinned layer 2 had a stackedstructure of a pair of iron-cobalt (FeCo) films and a ruthenium (Ru)film interposed between the pair of Fe—Co films, for example. Thethickness of the magnetization pinned layer 2 was set to 5 nm. Anantiferromagnetic layer was further provided to come into contact with asurface, of the magnetization pinned layer 2, opposite to theintermediate layer 3. Magnesium oxide (MgO) was adopted as a constituentmaterial of the intermediate layer 3, and the thickness of theintermediate layer 3 was set to 3 nm. Iron cobalt (FeCo) and nickel iron(NiFe) were each adopted as a constituent material of the magnetizationfree layer 4, and the thickness of the magnetization free layer 4 wasset to 18 nm.

It was confirmed, as illustrated in FIG. 6A, that, when the maximuminclination angle θ 2 of the end surface 41 is 42° or less, the angularerror was successfully reduced, regardless of intensity of the signalmagnetic field.

Experimental Example 2

Examination was conducted next, in terms of the magneto-resistive effectelement 1 according to the foregoing example embodiment, on arelationship between the minimum inclination angle θ 1 of the endsurface 41 and an angular error of an angle of a signal magnetic fieldhaving predetermined intensity. The angular error of the angle of thesignal magnetic field having predetermined intensity is to be detectedupon application of the signal magnetic field to the magneto-resistiveeffect element 1. The results thereof are illustrated in FIG. 6B. InFIG. 6B, the horizontal axis indicates the minimum inclination angle θ 1[in unit of degree, i.e.,° ] of the end surface 41 of the magnetizationfree layer 4, and the vertical axis indicates an angular error [in unitof degree, i.e.,° ] of the signal magnetic field to be detected by themagneto-resistive effect element 1. In this experimental example,experimental conditions were set similar to those of the above-describedExperimental Example 1.

It was confirmed, as illustrated in FIG. 6B, that, when the minimuminclination angle θ 1 of the end surface 41 is 25° or less, the angularerror was successfully reduced, regardless of intensity of the signalmagnetic field.

Experimental Example 3

Examination was conducted next, in terms of the magneto-resistive effectelement 1 according to the foregoing example embodiment, on arelationship between the thickness T1 [in unit of nm] of themagnetization free layer 4 and a saturating magnetic field [in unit ofmT] of the magnetization free layer 4. The results thereof areillustrated in FIG. 7A. In FIG. 7A, the horizontal axis indicates thethickness T1 [in unit of nm] of the magnetization free layer 4, and thevertical axis indicates the saturating magnetic field [in unit of mT] ofthe magnetization free layer 4. In this experimental example, themaximum inclination angle θ 2 of the end surface 41 was set to 31°; theminimum inclination angle θ 1 of the end surface 41 was set to 16°; andthe thickness T1 was set to 7 nm, 13 nm, and 19 nm. Other than theseconditions, experimental conditions were set similar to those of theabove-described Experimental Example 1.

It was confirmed, as illustrated in FIG. 7A, that, when the thickness T1is 13 nm or less, the saturating magnetic field of the magnetizationfree layer 4 was successfully reduced to 12 mT or less.

Experimental Example 4

Examination was conducted next, in terms of the magneto-resistive effectelement 1 according to the foregoing example embodiment, on arelationship between the thickness T1 [in unit of nm] of themagnetization free layer 4 and a resistance change rate, i.e., amagneto-resistance (MR) ratio [in an arbitrary unit (A.U.)] of themagnetization free layer 4. The results thereof are illustrated in FIG.7B. In FIG. 7B, the horizontal axis indicates the thickness T1 [in unitof nm] of the magnetization free layer 4, and the vertical axisindicates the MR ratio [in A.U.] of the magnetization free layer 4. Inthis experimental example, magnetostriction was set to 0. Further, themaximum inclination angle θ 2 of the end surface 41 was set to 31°; theminimum inclination angle θ 1 of the end surface 41 was set to 16°; andthe thickness T1 was varied in a range from 5 nm to 16 nm. Other thanthese conditions, experimental conditions were set similar to those ofthe above-described Experimental Example 1. It is to be noted that theMR ratio is denoted by an arbitrary unit, provided that a value of theMR ratio is set to 100 when the thickness T1 is 16 nm.

It was confirmed, as illustrated in FIG. 7B, that, when the thickness T1is 6 nm or more, a relatively high and stable MR ratio of themagnetization free layer 4 was obtained. It was thus found, referring toExperimental Example 3 illustrated in FIG. 7A and Experimental Example 4illustrated in FIG. 7B, that the thickness T1 in a range from 6 nm to 13nm makes it possible to both enhance sensitivity (i.e., the MR ratio)and reduce an output error (i.e., the saturating magnetic field), whilekeeping the magnetostriction low.

Experimental Example 5

Examination was conducted next, in terms of the magneto-resistive effectelement 1 according to the foregoing example embodiment, on arelationship between the length L1 [in unit of μm] of the magnetizationfree layer 4 and a saturating magnetic field [in unit of mT] of themagnetization free layer 4. The results thereof are illustrated in FIG.7C. In FIG. 7C, the horizontal axis indicates the length L1 [in unit ofμm] of the magnetization free layer 4, and the vertical axis indicatesthe saturating magnetic field [in unit of mT] of the magnetization freelayer 4. In this experimental example, the maximum inclination angle θ 2of the end surface 41 was set to 31°; the minimum inclination angle θ 1of the end surface 41 was set to 16°; and the thickness T1 was set to 7nm, 13 nm, and 19 nm. Other than these conditions, experimentalconditions were set similar to those of the above-described ExperimentalExample 1.

It was confirmed, as illustrated in FIG. 7C, that, when the length L1 is6 μm or less, the saturating magnetic field of the magnetization freelayer 4 was sharply increased. The present disclosure is thus expectedto have effects of controlling the maximum inclination angle θ 2 of theend surface 41 and the minimum inclination angle θ 1 of the end surface41 in a case where the length L1 is 6 μm or less.

Experimental Example 6

Examination was conducted next, in terms of the magneto-resistive effectelement 1 according to the foregoing example embodiment, on arelationship between a product [in unit of μm³] of the length L2 [inunit of μm] of the magnetization free layer 4 and the length L1 [in unitof μm] of the magnetization free layer 4 and a saturating magnetic field[in unit of mT] of the magnetization free layer 4. The results thereofare illustrated in FIG. 8. In FIG. 8, the horizontal axis indicates L2 *(L1)² [in unit of μm³], and the vertical axis indicates the saturatingmagnetic field [in unit of mT] of the magnetization free layer 4. Inthis experimental example, the maximum inclination angle θ 2 of the endsurface 41 was varied in a range from 16° to 50°, and the minimuminclination angle θ 1 of the end surface 41 was varied in a range from6° to 40°. The thickness T1 was set to 7 nm, 13 nm, and 19 nm. Otherthan these conditions, experimental conditions were set similar to thoseof the above-described Experimental Example 1.

It was confirmed, as illustrated in FIG. 8, that, when L2 * (L1)² ≥0.4holds, the saturating magnetic field of the magnetization free layer 4was successfully reduced to 12 mT or less.

[3. Other Modification Examples]

Although the disclosure has been described hereinabove with reference tothe example embodiment, the disclosure is by no means limited to theforegoing example embodiment, and may be modified in a variety of ways.For example, the foregoing example embodiment exemplifies themagneto-resistive effect element 1 in which the magnetization pinnedlayer 2, the intermediate layer 3, and the magnetization free layer 4are stacked in order on the lower electrode 6; however, themagneto-resistive effect element of the disclosure is not limitedthereto. The magneto-resistive effect element of the disclosure mayinclude a magneto-resistive effect element 1A according to amodification example illustrated in FIG. 5, for example. Themagneto-resistive effect element 1A may have a configuration in whichthe magnetization free layer 4, the intermediate layer 3, and themagnetization pinned layer 2 are stacked in order on a base that extendsalong the X-Y plane, with the lower electrode 6 being interposed betweenthe base and the magnetization free layer 4.

Moreover, the disclosure encompasses any possible combination of some orall of the various embodiments and the modification examples describedherein and incorporated herein.

It is possible to achieve at least the following configurations from theabove-described example embodiments of the disclosure.

-   (1) A magneto-resistive effect element including:

a magnetization free layer that extends along a first plane, andincludes an end surface that has a maximum inclination angle of 42° orless relative to the first plane;

an intermediate layer that extends along the first plane, and is stackedon the magnetization free layer; and

a magnetization pinned layer that extends along the first plane, and isprovided on side opposite to the magnetization free layer with theintermediate layer being interposed therebetween.

-   (2) A magneto-resistive effect element including:

a magnetization free layer that extends along a first plane, andincludes an end surface that has a minimum inclination angle of 25° orless relative to the first plane;

an intermediate layer that extends along the first plane, and is stackedon the magnetization free layer; and

a magnetization pinned layer that extends along the first plane, and isprovided on side opposite to the magnetization free layer with theintermediate layer being interposed therebetween.

-   (3) A magneto-resistive effect element including:

a magnetization free layer that extends along a first plane;

an intermediate layer that extends along the first plane, and is stackedon the magnetization free layer; and

a magnetization pinned layer that extends along the first plane, and isprovided on side opposite to the magnetization free layer with theintermediate layer being interposed therebetween,

the magnetization free layer including

-   -   a flat part that has a substantially constant first thickness,        and    -   an inclined part that includes an end surface, the inclined part        having a second thickness that decreases as being away from the        flat part, and

the magnetization free layer satisfying the following conditionalexpression (1):

L2* (L1)²≥0.4   (1)

where

L1 denotes a length of the flat part of the magnetization free layeralong the first plane, and

L2 denotes a length of the inclined part of the magnetization free layeralong the first plane.

-   (4) The magneto-resistive effect element according to any one of (1)    to (3), in which

the magnetization free layer further includes

-   -   a first principal surface that extends along the first plane,        and faces the intermediate layer, and    -   a second principal surface that extends along the first plane,        and is positioned on side opposite to the intermediate layer,        and    -   the end surface includes a part positioned between a first        position and a second position and being recessed from a        position on a linear line that connects the first position and        the second position on a second plane that is orthogonal to the        first plane, the first position being a position at which the        end surface and the first principal surface intersect each        other, the second position being a position at which the end        surface and the second principal surface intersect each other.

-   (5) The magneto-resistive effect element according to any one of (1)    to (4), in which the intermediate layer includes a first material    that is non-magnetic and electrically conductive or a second    material that is non-magnetic and non-electrically conductive.

-   (6) The magneto-resistive effect element according to any one of (1)    to (5), in which the magnetization free layer has a thickness in a    range from 6 nm to 13 nm in a thickness direction that is orthogonal    to the first plane.

-   (7) The magneto-resistive effect element according to any one of (1)    to (5), in which the magnetization free layer has a length of 6 μm    or less in a direction of a detection target magnetic field along    the first plane.

-   (8) The magneto-resistive effect element according to any one of (1)    to (7), in which area of the magnetization free layer along the    first plane is minimum at a position closest to the intermediate    layer.

-   (9) The magneto-resistive effect element according to (8), in which    the area of the magnetization free layer along the first plane    becomes smaller as being closer to the intermediate layer.

A magneto-resistive effect element according to an embodiment of thedisclosure includes: a magnetization free layer that extends along afirst plane; an intermediate layer that extends along the first plane,and is stacked on the magnetization free layer; and a magnetizationpinned layer that extends along the first plane, and is provided on sideopposite to the magnetization free layer with the intermediate layerbeing interposed therebetween. Here, the magnetization free layerincludes an end surface that has a maximum inclination angle of 42° orless relative to the first plane.

In the magneto-resistive effect element according to one embodiment ofthe disclosure, the magnetization free layer includes an end surfacethat has a maximum inclination angle of 42° or less relative to thefirst plane, thus alleviating the influence of the shape anisotropy ofthe magnetization free layer, allowing for reduction in an amount ofmagnetization, positioned near the end surface, which is less likely tofollow the external magnetic field.

A magneto-resistive effect element according to an embodiment of thedisclosure includes: a magnetization free layer that extends along afirst plane; an intermediate layer that extends along the first plane,and is stacked on the magnetization free layer; and a magnetizationpinned layer that extends along the first plane, and is provided on sideopposite to the magnetization free layer with the intermediate layerbeing interposed therebetween. Here, the magnetization free layerincludes an end surface that has a minimum inclination angle of 25° orless relative to the first plane.

In the magneto-resistive effect element according to one embodiment ofthe disclosure, the magnetization free layer includes an end surfacethat has a minimum inclination angle of 25° or less relative to thefirst plane, thus alleviating the influence of the shape anisotropy ofthe magnetization free layer, allowing for reduction in the amount ofthe magnetization, positioned near the end surface, which is less likelyto follow the external magnetic field.

A magneto-resistive effect element according to an embodiment of thedisclosure includes: a magnetization free layer that extends along afirst plane; an intermediate layer that extends along the first plane,and is stacked on the magnetization free layer; and a magnetizationpinned layer that extends along the first plane, and is provided on sideopposite to the magnetization free layer with the intermediate layerbeing interposed therebetween. Here, the magnetization free layerincludes a flat part that has a substantially constant first thickness,and an inclined part including an end surface and having a secondthickness that decreases as being away from the flat part. Themagnetization free layer satisfies the following conditional expression(1).

L2* (L1)²>0.4   (1)

where L1 denotes a length of the flat part of the magnetization freelayer along the first plane, and L2 denotes a length of the inclinedpart of the magnetization free layer along the first plane.

In the magneto-resistive effect element according to one embodiment ofthe disclosure, the conditional expression (1) is satisfied, thusalleviating the influence of the shape anisotropy of the magnetizationfree layer, allowing for reduction in the amount of the magnetization,positioned near the end surface, which is less likely to follow theexternal magnetic field.

A magneto-resistive effect element according to an embodiment of thedisclosure includes: a magnetization free layer that extends along afirst plane; an intermediate layer that extends along the first plane,and is stacked on the magnetization free layer; a magnetization pinnedlayer that extends along the first plane, and is provided on sideopposite to the magnetization free layer with the intermediate layerbeing interposed therebetween. Here, area of the magnetization freelayer along the first plane is minimum at a position closest to theintermediate layer.

In the magneto-resistive effect element according to one embodiment ofthe disclosure, area of the magnetization free layer along the firstplane is minimum at a position closest to the intermediate layer, thusmaking it possible to keep the magnetization, positioned near the endsurface, which is less likely to follow the external magnetic field awayfrom the intermediate layer.

According to the magneto-resistive effect element of one embodiment ofthe disclosure, it is possible to suppress the influence of the shapeanisotropy of the magnetization free layer, and thus to achieve a lowersaturating magnetic field in the magnetization free layer. It is to benoted that effects of the disclosure are not limited thereto, and may beany effects as described hereinabove.

Although the disclosure has been described in terms of exemplaryembodiments, it is not limited thereto. It should be appreciated thatvariations may be made in the described embodiments by persons skilledin the art without departing from the scope of the disclosure as definedby the following claims. The limitations in the claims are to beinterpreted broadly based on the language employed in the claims and notlimited to examples described in this specification or during theprosecution of the application, and the examples are to be construed asnon-exclusive. For example, in this disclosure, the term “preferably”,“preferred” or the like is non-exclusive and means “preferably”, but notlimited to. The use of the terms first, second, etc. do not denote anyorder or importance, but rather the terms first, second, etc. are usedto distinguish one element from another. The term “substantially” andits variations are defined as being largely but not necessarily whollywhat is specified as understood by one of ordinary skill in the art. Theterm “about” as used herein can allow for a degree of variability in avalue or range. Moreover, no element or component in this disclosure isintended to be dedicated to the public regardless of whether the elementor component is explicitly recited in the following claims.

What is claimed is:
 1. A magneto-resistive effect element comprising: amagnetization free layer that extends along a first plane; anintermediate layer that extends along the first plane; and amagnetization pinned layer that extends along the first plane, and isprovided on a side opposite to the magnetization free layer with theintermediate layer being interposed therebetween, the magnetization freelayer including: a flat part that has a substantially constant firstthickness, and an inclined part that includes an end surface, theinclined part having a second thickness that decreases as being awayfrom the flat part, and the magnetization free layer satisfying thefollowing conditional expression (1):L2*(L1)²≥0.4 μm ³ (cubic micrometers)   (1) where: L1 denotes a lengthin μm (micrometers) of the flat part of the magnetization free layeralong the first plane, and L2 denotes a length in μm (micrometers) ofthe inclined part of the magnetization free layer along the first plane.2. A magneto-resistive effect element comprising: a magnetization freelayer that extends along a first plane, and includes an end surface thathas a maximum inclination angle of 42° or less relative to the firstplane; an intermediate layer that extends along the first plane; and amagnetization pinned layer that extends along the first plane, and isprovided on a side opposite to the magnetization free layer with theintermediate layer being interposed therebetween, wherein: themagnetization free layer further includes: a first principal surfacethat extends along the first plane, and faces the intermediate layer,and a second principal surface that extends along the first plane, andis positioned on a side opposite of the intermediate layer, and the endsurface includes a part that is positioned between a first position anda second position on a second plane that is orthogonal to the firstplane, the first position being a position at which the end surface andthe first principal surface intersect each other, the second positionbeing a position at which the end surface and the second principalsurface intersect each other.
 3. A magneto-resistive effect elementcomprising: a magnetization free layer that extends along a first plane,and includes an end surface that has a minimum inclination angle of 25°or less relative to the first plane; an intermediate layer that extendsalong the first plane; and a magnetization pinned layer that extendsalong the first plane, and is provided on a side opposite to themagnetization free layer with the intermediate layer being interposedtherebetween, wherein: the magnetization free layer further includes: afirst principal surface that extends along the first plane, and facesthe intermediate layer, and a second principal surface that extendsalong the first plane, and is positioned on a side opposite of theintermediate layer, and the end surface includes a part that ispositioned between a first position and a second position and isrecessed from a position on a linear line that connects the firstposition and the second position on a second plane that is orthogonal tothe first plane, the first position being a position at which the endsurface and the first principal surface intersect each other, the secondposition being a position at which the end surface and the secondprincipal surface intersect each other.
 4. The magneto-resistive effectelement according to claim 1, wherein: the magnetization free layerfurther includes: first principal surface that extends along the firstplane, and faces the intermediate layer, and a second principal surfacethat extends along the first plane, and is positioned on a side oppositeto the intermediate layer, and the end surface includes a part that ispositioned between a first position and a second position and isrecessed from a position on a linear line that connects the firstposition and the second position on a second plane that is orthogonal tothe first plane, the first position being a position at which the endsurface and the first principal surface intersect each other, the secondposition being a position at which the end surface and the secondprincipal surface intersect each other.
 5. The magneto-resistive effectelement according to claim 2, wherein the intermediate layer includes afirst material that is non-magnetic and electrically conductive or asecond material that is non-magnetic and non-electrically conductive. 6.The magneto-resistive effect element according to claim 2, wherein themagnetization free layer has a thickness in a range from 6 nm(nanometers) to 13 nm in a thickness direction that is orthogonal to thefirst plane.
 7. The magneto-resistive effect element according to claim2, wherein the magnetization free layer has a length of 6 μm or less ina direction of a detection target magnetic field along the first plane.8. The magneto-resistive effect element according to claim 2, wherein anarea of the magnetization free layer along the first plane is a minimumat a position closest to the intermediate layer.
 9. Themagneto-resistive effect element according to claim 8, wherein the areaof the magnetization free layer along the first plane decreases along adirection toward the intermediate layer.